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The invention relates to optical glass deep processing technology, specifically involves an optical lens coating membrane layer structure and the coating method

by:ChangHui     2020-07-03
Technical background: optical lens coating is to use physical or chemical method in material surface plating on a transparent layer of electrolyte membrane, or coated with a layer of metal film, the purpose is to change the material on the surface of the reflection and transmission characteristics. Within the scope of the visible and infrared bands, most of the reflectivity of the metal can reach 78% ~ 98%, but it is hard to exceed 89%. Both for CO2 laser, the use of copper, molybdenum, silicon and germanium, etc to make reflectors, germanium and gallium arsenide, zinc selenide and transmission optical element as the output window material, or for YAG laser adopt ordinary optical glass as a mirror, output mirror and transmission optical element material, can't meet the requirements of more than 99% of the total reflection mirror. Different application have different output mirror transmittance requirement, so we must adopt optical coating method. For CO2 laser in the infrared wave band, the commonly used coating material with yttrium fluoride, fluoride, praseodymium, germanium, etc; For YAG laser or visible near infrared band, the commonly used coating materials of zinc sulfide, magnesium fluoride, titanium dioxide, zirconium oxide, etc. In addition to the high of the film, coating, can also be plated on a certain wavelength reflection, to a special wavelength increases the transmission of the membrane, such as laser frequency multiplication technology of beamsplitters, etc. In the existing technology, optical lens coating 41 mature film system layer, 43 and 45 membrane structure, due to the coating material cost is higher, and coating process cycle time is longer, with the traditional 41, 43 layer or 45 membrane system for optical lens coating, high production cost. Technical implementation elements: the aim of the present invention is to provide an optical lens coating film layer structure, the coating layer structure through unique bottom film layer, middle layer and the combination of the mask layer, achieved with the existing technology of 41, 43 layer or 45 membrane is the same optical performance, saves the production cost, improve the processing efficiency. To achieve the above purpose, adopted by the technical scheme of the invention is: an optical lens coating film layer structure, including lenses in matrix in the basilar membrane on the plating layer, middle layer and layer mask, described the lenses are blue glass filter film, described the bottom film layer for magnesium fluoride membrane layer, described in the magnesium fluoride membrane layer thickness is 54. 00nm - 66. 00 nm, described the middle layer is five titanium oxide film layer, as described in the thickness of the membrane layer for ti3o5 9. 12nm - 9. 46 nm, described the mask layer is sio2 membrane layer, described in the silica membrane layer thickness for 44. 80nm - 45. 98nm。 Compared with the existing technology, the present invention has the following advantages: the invention of close to the substrate three layer membrane for precise control of lenses, achieved through the thickness of the special combination with the existing technology of gm's 41 membrane, membrane is 43, 45 layer film of the same or similar optical properties, save the coating material, shortening the period of the coating and improve the efficiency of the coating. Other advantages of the invention, the target and characteristics through the instructions below to reflect the part, the part will also through the study and practice of the invention for the technical personnel in the field of understanding. Illustrated that figure 1 is the invention of film structure diagram. Figure 2 is the invention of film layer structure and 45 membrane layer structure of spectrum characteristic curve comparison chart. Concrete implementation way in order to make the implementation of technical means, the invention creation characteristics, purpose and function is more clear and easy to understand, combined with the appended drawings and specific implementation way below this invention further elaborated: as an optical lens coating layer structure of the invention of an example: an optical lens coating film layer structure, including on the substrate lens 10, in turn, the bottom on the plating membrane layer, middle layer 12 and 11 mask layer 13, described in the matrix lens 10 for blue glass filter film, described the bottom film layer 11 to magnesium fluoride membrane layer, described in the magnesium fluoride membrane layer thickness is 54. 12 12 nm, described the middle layer of five titanium oxide film layer, described the thickness of the membrane layer for ti3o5 9. 13 14 nm, described the mask layer is sio2 membrane layer, described in the silica membrane layer thickness for 44. 88nm。 The scheme of coating layer structure, to achieve with the existing 41 or 43 layer membrane structure similar optical properties. As an optical lens coating layer structure of the invention of another example: an optical lens coating layer structure, including on the substrate lens 10, in turn, the bottom on the plating membrane layer, middle layer 12 and 11 mask layer 13, described in the matrix lens 10 for blue glass filter film, described the bottom film layer 11 to magnesium fluoride membrane layer, described in the magnesium fluoride membrane layer thickness for 66. 00 nm, described the middle membrane 12 into five titanium oxide film layer, as described in the thickness of the membrane layer ti3o5 is 9. 13 46 nm, described the mask layer is sio2 membrane layer, described in the silica membrane layer thickness of 45. 98nm。 The scheme of coating layer structure, to achieve with the existing 43 or 45 layer membrane structure, similar optical properties. As an optical lens coating layer structure of the invention of an optimization example: an optical lens coating layer structure, including on the substrate lens 10, in turn, the bottom on the plating membrane layer, middle layer 12 and 11 mask layer 13, described in the matrix lens 10 for blue glass filter film, described the bottom film layer 11 to magnesium fluoride membrane layer, described in the magnesium fluoride membrane layer thickness is 60. 00 nm, described the middle membrane 12 into five titanium oxide film layer, as described in the thickness of the membrane layer ti3o5 is 9. 13 30 nm, described the mask layer is sio2 film layer, the silica membrane layer thickness of 45. 83nm。 For plating coating layer structure of the optimization of matrix lenses with island ferry UV1800 spectral detecting instrument for testing, reached with traditional 41, 43 or 45 layer membrane layer structure almost exactly the same optical properties, its optical performance test with 45 membrane system diagram is shown in figure 2. By detecting than in figure 2 shows, the invention of the 39 layer membrane structure and the traditional optical properties of 45 layer membrane structure are almost identical, permeability and infrared blocking of visible light is very consistent, on the basis of to reduce the number of the membrane layer upon layer, the coating layer structure saves material cost, shorten the cycle coating process, at the same time corresponding auxiliary program time get shorter, effectively reduce the production cost, improve the processing efficiency.
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