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| Parameter | Precision | High Precision |
| Diamater | 4-200mm | 4-200mm |
| Thickness | ±0.010mm | ±0.010mm |
| Diameter Tolerance | ±0.010mm | ±0.010mm |
| Surface Quality | 60/40SD | 10/5SD |
| Flatness | λ/4 | λ/10 |
| Centering | 1 arcmin | 0.5 arcmin |
| Parameter | Precision | High Precision |
| Diamater | 4-200mm | 4-200mm |
| Thickness | ±0.010mm | ±0.010mm |
| Diameter Tolerance | ±0.010mm | ±0.010mm |
| Surface Quality | 60/40SD | 10/5SD |
| Flatness | λ/4 | λ/10 |
| Centering | 1 arcmin | 0.5 arcmin |